Specification:
1. 4”/6" Stainless Vacuum Chuck
2. Vacuum On-OFF Switch to control
3. Huge-Knob Chuck Stage X-Y Line Fine movement
distance 4”x4”/6”x6”, resolution 5μm
4. Chuck theta rotation 0°~360° manual
5. Microscope Universal Coupling travel
Z Line Fine Up-Down 50mm,resolution 5μm
6. Microscope Total Mag. 14X~135X
7. Upgrade: CCD Monitor, Thermal Chuck, Vibration Isolation Table, Shielding Box