Specification:

1. 6inch/8inch Stainless Vacuum Chuck
2. Vacuum ON-OFF Switches to control each ring

3. Huge-Knob Chuck Stage X-Y Line Fine movement  

distance 6”x6”/8”x8”, resolution 2μm

4. Fast Pull-out Y stage for easy Loading/Unloading

5. Chuck theta rotation 0°～360° manual
6. Platen Line Fine Up-Down 25mm, resolution 2μm
7. Platen Line Quick Up-Down 6mm
8. Microscope mount X-Y Line travel 2”x2”

Z Line Fine Up-Down 50mm,resolution 1μm

9. Microscope Tilting Manual with Lever 30 degree

10. Microscope Total Mag. 10X~1000X

11. Upgrade: CCD Monitor, Thermal Chuck, Vibration Isolation Table, Shielding Box, Probe Card Holder