Specification:
1. 8inch/12inch Stainless Vacuum Chuck
2. Vacuum ON-OFF Switches to control each ring
3.Huge-Knob Chuck Stage X-Y Line Fine movement   

distance 8”x8”/12”x12”, resolution 2μm

4. Chuck theta rotation 0°～360° manual

5. Platen Line Fine Up-Down 25mm, resolution 2μm

6. Platen Line Quick Up-Down 6mm

7. Microscope Z Line Pneumatic lifting

Z Line Fine Up-Down 50mm, resolution 1μm

8. Microscope mount X-Y Line travel 2”x2”

9. Microscope LensAutomatic Switchover

10. Microscope Total Mag. 2X~2000X

11. Laser Cutting Wavelength

1064nm, 532nm, 355nm, 266nm

12.AvailableUpdate: CCD Monitor, Thermal chuck, Vibration Isolation Table, Shielding Box, Probe Card Holder